Damping Measurement for Wafer-Level Packaged MEMS Acceleration Sensors

Two methods were developed for mechanical analysis of MEMS sensors. Army Research Laboratory, Adelphi, Maryland Microelectromechanical system (MEMS) three-axis acceleration threshold sensors have been developed to measure acceleration threshold levels using voltage switching when the threshold is reached. Determining damping coefficients is important for categorizing how each threshold sensor or switch operates. Switches with different damping coefficients result in different mechanical impedances and response times. Analytical and numerical methods to model damping coefficient values based on empirical data are needed to characterize three-axis acceleration sensors; traditional methods use the displacement of an underdamped system to calculate the damping ratio.

Posted in: Briefs, Defense, MEMs, Sensors, Measuring Instruments, Sensors and actuators, Switches